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アイテム
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Simulation of electrodeposition of copper onto TiN substrate
https://jaxa.repo.nii.ac.jp/records/13892
https://jaxa.repo.nii.ac.jp/records/13892b8db1118-4230-493d-9155-5f016e54388c
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Simulation of electrodeposition of copper onto TiN substrate | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | TiN | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 電析 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | モンテカルロシミュレーション | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 銅 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 核形成 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 重力効果 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 準拡散係数 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 位置分布 | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | TiN | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | electrodeposition | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Monte Carlo simulation | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | copper | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | nucleation | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | gravitational effect | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | pseudo-diffusion coefficient | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | spatial distribution | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
その他のタイトル | ||||||
その他のタイトル | TiN基板上への銅の電析とシミュレーション | |||||
著者 |
森末, 将文
× 森末, 将文× 福中, 康博× 日下, 英史× 石井, 隆次× 安田, 秀幸× 栗林, 一彦× Morisue, Masafumi× Fukunaka, Yasuhiro× Kusaka, Eishi× Ishii, Ryuji× Yasuda, Hideyuki× Kuribayashi, Kazuhiko |
|||||
著者所属 | ||||||
京都大学 大学院エネルギー科学研究科 | ||||||
著者所属 | ||||||
京都大学 大学院エネルギー科学研究科 | ||||||
著者所属 | ||||||
京都大学 大学院エネルギー科学研究科 | ||||||
著者所属 | ||||||
京都大学 大学院エネルギー科学研究科 | ||||||
著者所属 | ||||||
大阪大学 大学院工学研究科 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構 宇宙科学研究本部 | ||||||
著者所属(英) | ||||||
en | ||||||
Kyoto University Graduate School of Energy Science | ||||||
著者所属(英) | ||||||
en | ||||||
Kyoto University Graduate School of Energy Science | ||||||
著者所属(英) | ||||||
en | ||||||
Kyoto University Graduate School of Energy Science | ||||||
著者所属(英) | ||||||
en | ||||||
Kyoto University Graduate School of Energy Science | ||||||
著者所属(英) | ||||||
en | ||||||
Osaka University Graduate School of Engineering | ||||||
著者所属(英) | ||||||
en | ||||||
Japan Aerospace Exploration Agency Institute of Space and Astronautical Science | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構宇宙科学研究本部 | |||||
出版者(英) | ||||||
出版者 | Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS) | |||||
書誌情報 |
宇宙利用シンポジウム 第20回 平成15年度 en : Space Utilization Research: Proceedings of the Twentieth Space Utilization Symposium p. 285-287, 発行日 2004-03 |
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抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | The initial stage of electrodeposition of Cu(2+) ion in 0.05 M CuSO4 aqueous solution onto TiN substrate was studied. Two different electrolytic configurations were employed in order to quantitatively discuss the effect of gravitational strength on the nucleation related phenomena of electrodeposited metal in detail: 1) a horizontal cathode facing downward over an anode (C/A) and 2) an anode over cathode (A/C). These results show that A/C configuration introduces more number of nuclei than the case of C/A. Moreover, the presence of nucleation inhibition or exclusion zone was confirmed from the statistical analysis of spatial distribution of nuclei. A simplified Monte Carlo type of simulation was engaged in the present paper. | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0046917087 |