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Effect of gravitational level on nucleation phenomena of electrodeposited copper onto TiN substrate
https://jaxa.repo.nii.ac.jp/records/13956
https://jaxa.repo.nii.ac.jp/records/13956fac4ad4f-9ecd-46c6-aab8-19eab23b658b
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Effect of gravitational level on nucleation phenomena of electrodeposited copper onto TiN substrate | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | TiN基板 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 核形成 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 重力効果 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 電着物 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 形態学 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 干渉法 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | その場測定 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 微小重力 | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | TiN substrate | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | nucleation | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | gravitational effect | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | electrodeposition | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | morphology | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | interferometry | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | in situ measurement | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | microgravity | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
その他のタイトル | ||||||
その他のタイトル | TiN基板上への銅電析における核発生現象に及ぼす重力レベルの影響 | |||||
著者 |
森末, 将文
× 森末, 将文× 小西, 陽子× 福中, 康博× 日下, 英史× 石井, 隆次× 栗林, 一彦× Morisue, Masafumi× Konishi, Yoko× Fukunaka, Yasuhiro× Kusaka, Eishi× Ishii, Ryuji× Kuribayashi, Kazuhiko |
|||||
著者所属 | ||||||
京都大学 大学院エネルギー科学研究科 | ||||||
著者所属 | ||||||
Univ. of Illinois at Urbana-Champaign Dept. of Chem. & Biomolecular Eng. | ||||||
著者所属 | ||||||
京都大学 大学院エネルギー科学研究科 | ||||||
著者所属 | ||||||
京都大学 大学院エネルギー科学研究科 | ||||||
著者所属 | ||||||
京都大学 大学院エネルギー科学研究科 | ||||||
著者所属 | ||||||
宇宙科学研究所 | ||||||
著者所属(英) | ||||||
en | ||||||
Kyoto University Graduate School of Energy Science | ||||||
著者所属(英) | ||||||
en | ||||||
University of Illinois at Urbana-Champaign Department of Chemical & Biomolecular Engineering | ||||||
著者所属(英) | ||||||
en | ||||||
Kyoto University Graduate School of Energy Science | ||||||
著者所属(英) | ||||||
en | ||||||
Kyoto University Graduate School of Energy Science | ||||||
著者所属(英) | ||||||
en | ||||||
Kyoto University Graduate School of Energy Science | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science | ||||||
出版者 | ||||||
出版者 | 宇宙科学研究所 | |||||
出版者(英) | ||||||
出版者 | The Institute of Space and Astronautical Science (ISAS) | |||||
書誌情報 |
宇宙利用シンポジウム 第19回 平成14年度 en : Space Utilization Research: Proceedings of the Nineteenth Space Utilization Symposium p. 171-174, 発行日 2003-02 |
|||||
抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Cu(2+) ion was electrodeposited in 0.05 M CuSO4 aqueous solution onto a heterogeneous substrate of TiN sputtered on a stainless steel sheet. Two different electrolytic cell configurations were designed in order to quantitatively discuss the effect of gravitational strength on the nucleation related phenomena of electrodeposited metal in detail: 1) a horizontal cathode facing downward over an anode (C/A) and 2) an anode over cathode (A/C). These results show that A/C configuration introduces more number of nucleuses than the case of C/A. Image analysis technique demonstrates copper metal randomly nucleated over the TiN substrate and no space correlation between nuclei. TiN film certainly provides a good substrate to examine the effect of the gravitational level to the initial stage of electrodeposition of Cu(2+) ion in CuSO4 aqueous solution. | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0045438049 |