Shizuoka University
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)
Shizuoka University
出版者
宇宙航空研究開発機構宇宙科学研究本部
出版者（英）
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)
Measurement technique of differential sputter yield is described in this study. The equipment consists of multiple Quartz Crystal Microbalances that are positioned on a single azimuthally plane from a target region where xenon ion beams are aimed. We measured differential sputter yields for Molybdenum after exposure to Xenon ion bombardment at multiple angles of incidence (0 - 60 deg) and ion energies (200 - 1000 eV). Sputter yield data for Molybdenum are shown for a range of xenon ion energies from 100 eV to 1000 eV and a range of ion beam incidence angle from 0 deg to 75 deg.
イオンエンジングリッド材料に関する微分スパッタ率測定
