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低エネルギーカーボンスパッタリングに関するXe蓄積効果
https://jaxa.repo.nii.ac.jp/records/2085
https://jaxa.repo.nii.ac.jp/records/208509223eea-f111-4d42-89f6-3267feeaac3a
名前 / ファイル | ライセンス | アクション |
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64642004.pdf (677.2 kB)
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Item type | テクニカルレポート / Technical Report(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
タイトル | 低エネルギーカーボンスパッタリングに関するXe蓄積効果 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Sputtering, Grid Erosion, Accumulation of Xe, JIEDI Tool | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_18gh | |||||
資源タイプ | technical report | |||||
その他のタイトル(英) | ||||||
その他のタイトル | Effect of accumulation of incident particles into a target material on sputtering under low-energy ion bombardment | |||||
著者 |
剣持, 貴弘
× 剣持, 貴弘× 和田, 元× 百武, 徹× 村本, 哲也× 西田, 迪雄× Kenmotsu, Takahiro× Wada, Motoi× Hyakutake, Toru× Muramoto, Tetsuya× Nishida, Michio |
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著者所属 | ||||||
同志社大学 | ||||||
著者所属 | ||||||
同志社大学 | ||||||
著者所属 | ||||||
岡山大学 | ||||||
著者所属 | ||||||
岡山理科大学 | ||||||
著者所属 | ||||||
崇城大学 | ||||||
著者所属(英) | ||||||
en | ||||||
Doshisha University | ||||||
著者所属(英) | ||||||
en | ||||||
Doshisha University | ||||||
著者所属(英) | ||||||
en | ||||||
Okayama University | ||||||
著者所属(英) | ||||||
en | ||||||
Okayama University of Science | ||||||
著者所属(英) | ||||||
en | ||||||
Sojo University | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構 | |||||
出版者(英) | ||||||
出版者 | Japan Aerospace Exploration Agency (JAXA) | |||||
書誌情報 |
宇宙航空研究開発機構研究開発報告: イオン加速グリッド耐久認定用数値解析 JIEDI (JAXA Ion Engine Development Initiatives) ツールの研究開発ワークショップ論文集 en : JAXA Research and Development Report 巻 JAXA-RR-09-004, 発行日 2010-02-26 |
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会議概要(会議名, 開催地, 会期, 主催者等)(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetime | |||||
抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | The sputtering yields of carbon have been measured during xenon ion bombardment under the threshold energy predicted by the theory at normal incidence. The theoretical threshold energy is 160.84 eV for the xenon-carbon combination. These experimental results are different from the semi-empirical formula proposed by Yamamura and Tawara. We have calculated the sputtering yields of carbon under the xenon ion bombardment with a Monte Carlo code ACAT which is based on the binary collision approximation. The yields of carbon calculated with ACAT are in good agreement with the semi-empirical formula, but differ from the experiments under low-energy xenon bombardment. This discrepancy is believed to be due to the accumulation of xenon onto graphite. The semi-empirical formula and the above ACAT results do not consider this accumulation. In order to quantify this effect, we have calculated with ACAT for the carbon - xenon composite material as a function of xenon concentration. The results of ACAT with 14% xenon atoms in graphite are in good agreement with the experimental data. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 形態: カラー図版あり | |||||
内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Physical characteristics: Original contains color illustrations | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1349-1113 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA1192675X | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0064642004 | |||||
レポート番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | レポート番号: JAXA-RR-09-004 |