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Iridium-Coated Micropore X-ray Optics Using Dry Etching of a Silicon Wafer and Atomic Layer Deposition
https://jaxa.repo.nii.ac.jp/records/28155
https://jaxa.repo.nii.ac.jp/records/28155e9fd1f6a-480a-48f1-bfd0-00a49ee46acd
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Iridium-Coated Micropore X-ray Optics Using Dry Etching of a Silicon Wafer and Atomic Layer Deposition | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
小川, 智弘
× 小川, 智弘× 江副, 祐一郎× 森山, 鉄平× 三石, 郁之× 垣内, 巧也× 大橋, 隆哉× 満田, 和久× Putkonen, Matti× Ogawa, Tomohiro× Ezoe, Yuichiro× Moriyama, Teppei× Mitsuishi, Ikuyuki× Kakiuchi, Takuya× Ohashi, Takaya× Mitsuda, Kazuhisa× Putkonen, Matti |
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著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS) 宇宙物理学研究系 | ||||||
著者所属 | ||||||
VTT Technical Research Centre of Finland : School of Chemical Technology, Aalto University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Space Astronomy and Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
VTT Technical Research Centre of Finland : School of Chemical Technology, Aalto University | ||||||
出版者(英) | ||||||
出版者 | Optical Society of America | |||||
書誌情報 |
en : Applied Optics 巻 52, 号 24, p. 5949-5956, 発行日 2013-08-20 |
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内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Accepted: 2013-07-18 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0003-6935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1364/AO.52.005949 | |||||
関連名称 | info:doi/10.1364/AO.52.005949 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: SA1004863000 |