Institute of Space and Aeronautical Science, University of Tokyo
Institute of Space and Aeronautical Science, University of Tokyo
Institute of Space and Aeronautical Science, University of Tokyo
Institute of Space and Aeronautical Science, University of Tokyo
A mass spectrometer employing a molecular beam sampling system was constructed for the analysis of atoms and radicals in chemically reacting gases. It consists of a three stage differentially pumped vacuum system and a quadrupole massfilter as a detector. For analysing chemical species of low concentration, molecular beam is mechanically modulated and the signal-to-noise ratio of the modulated beam is improved by employing a data processing system. The constructed system is capable of analysing chemical species of low concentrations up to 8 ppm for a chemically stable species such as argon.
<論文>低濃度化学種の分析装置 : 分子線質量分析計
SA0125615.pdf
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