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Verification of homogeneous In(x)Ga(1-x)As crystal growth by the TLZ (Traveling Liquidus-Zone) method
https://jaxa.repo.nii.ac.jp/records/42957
https://jaxa.repo.nii.ac.jp/records/42957ad637347-04c4-49d6-bc25-3d2af295e8e2
名前 / ファイル | ライセンス | アクション |
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46981001.pdf (1.7 MB)
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Item type | テクニカルレポート / Technical Report(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Verification of homogeneous In(x)Ga(1-x)As crystal growth by the TLZ (Traveling Liquidus-Zone) method | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | TLZ法 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 結晶成長 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | In(x)Ga(1-x)As | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 温度勾配 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 濃度 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 均一性 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | モデル | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 並進運動 | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | TLZ method | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | crystal growth | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | In(x)Ga(1-x)As | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | temperature gradient | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | concentration | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | homogeneity | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | model | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | translational motion | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_18gh | |||||
資源タイプ | technical report | |||||
その他のタイトル | ||||||
その他のタイトル | 飽和溶融帯移動法(TLZ法)による均質なIn(x)Ga(1-x)As結晶成長の証明 | |||||
著者 |
鶴, 哲也
× 鶴, 哲也× 岩井, 正行× 村松, 祐治× 木下, 恭一× 緒方, 康行× 足立, 聡× 越川, 尚清× 依田, 真一× Tsuru, Tetsuya× Iwai, Masayuki× Muramatsu, Yuji× Kinoshita, Kyoichi× Ogata, Yasuyuki× Adachi, Satoshi× Koshikawa, Naokiyo× Yoda, Shinichi |
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著者所属 | ||||||
エイ・イー・エス | ||||||
著者所属 | ||||||
エイ・イー・エス | ||||||
著者所属 | ||||||
エイ・イー・エス | ||||||
著者所属 | ||||||
宇宙開発事業団 | ||||||
著者所属 | ||||||
宇宙開発事業団 | ||||||
著者所属 | ||||||
宇宙開発事業団 | ||||||
著者所属 | ||||||
宇宙開発事業団 | ||||||
著者所属 | ||||||
宇宙開発事業団 | ||||||
著者所属(英) | ||||||
en | ||||||
Advanced Engineering Services Co. Ltd. | ||||||
著者所属(英) | ||||||
en | ||||||
Advanced Engineering Services Co. Ltd. | ||||||
著者所属(英) | ||||||
en | ||||||
Advanced Engineering Services Co. Ltd. | ||||||
著者所属(英) | ||||||
en | ||||||
National Space Development Agency of Japan | ||||||
著者所属(英) | ||||||
en | ||||||
National Space Development Agency of Japan | ||||||
著者所属(英) | ||||||
en | ||||||
National Space Development Agency of Japan | ||||||
著者所属(英) | ||||||
en | ||||||
National Space Development Agency of Japan | ||||||
著者所属(英) | ||||||
en | ||||||
National Space Development Agency of Japan | ||||||
出版者 | ||||||
出版者 | 宇宙開発事業団 | |||||
出版者(英) | ||||||
出版者 | National Space Development Agency of Japan (NASDA) | |||||
書誌情報 |
宇宙開発事業団技術報告: 化合物半導体研究アニュアルレポート2002:混晶半導体(InGaAs)の結晶育成に及ぼす微小重力の効果に関する研究.均一組成結晶の育成 en : NASDA Technical Memorandum: Annual Report of the Semiconductor Team in NASDA Space Utilization Research Program (2002): Effects of Microgravity Environment on Growth Related Properties of Semiconductor Alloys (InGaAs). Growth of Homogeneous Crystals p. 11-18, 発行日 2003-08-29 |
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抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | The TLZ (Traveling Liquidus-Zone) method has been invented as a new crystal growth method, which enables growing compositionally homogeneous mixed crystals of In(x)Ga(1-x)As (X:0.3). In this study, examined was the relation between sample translation rates and compositions of grown crystals, and the TLZ growth model was verified. In addition, the effects of temperature gradient were examined. The growth of a long homogeneous crystal was tried. As a result, a homogeneous crystal was obtained at the sample translation rate in accordance with that calculated from the TLZ growth model. It was not successful to grow homogeneous crystals at other sample translation rates. Also succeeded was a homogeneous crystal growth at another temperature gradient, and a 60 mm long homogeneous crystal longer than those crystals was obtained so far. It was thus verified that the TLZ growth model can be applied to the real crystal growth, and accuracy of the model prediction was confirmed. | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1345-7888 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00364784 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0046981001 | |||||
レポート番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | レポート番号: NASDA-TMR-030006E |