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Grinding and chemical mechanics polishing process for micropore x-ray optics fabricated with deep reactive ion etching
https://jaxa.repo.nii.ac.jp/records/46084
https://jaxa.repo.nii.ac.jp/records/460843145e45f-c60d-4d70-aeae-d13b89cbe9ea
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2019-12-17 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Grinding and chemical mechanics polishing process for micropore x-ray optics fabricated with deep reactive ion etching | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
福島, 碧都
× 福島, 碧都× 藤谷, 麻衣子× 石川, 久美× 沼澤, 正樹× 伊師, 大貴× 大坪, 亮太× 永利, 光× 鈴木, 光× 湯浅, 辰哉× 大橋, 隆哉× 満田, 和久× 江副, 祐一郎× Fukushima, Aoto× Fujitani, Maiko× Ishikawa, Kumi× Numazawa, Masaki× Ishi, Daiki× Otsubo, Ryota× Nagatoshi, Hikaru× Suzuki, Hikaru× Yuasa, Tatsuya× Ohashi, Takaya× Mitsuda, Kazuhisa× Ezoe, Yuichiro |
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著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS) | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS) | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
出版者(英) | ||||||
出版者 | Optical Society of America | |||||
書誌情報 |
en : Applied Optics 巻 58, 号 19, p. 5240-5247, 発行日 2019-07-01 |
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内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 著者人数: 12名 | |||||
内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Accepted: 2019-06-07 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1559-128X | |||||
ISSNONLINE | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 2155-3165 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1364/AO.58.005240 | |||||
関連名称 | info:doi/10.1364/AO.58.005240 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: SA1190048000 |