@article{weko_23503_1,
   author	 = "星乃,紀博 and 田島,道夫 and 林,利彦 and 西口,太郎 and 木下,博之 and 塩見,弘",
   title	 = "Nondestructive Analysis of Stacking Faults in 4H-SiC Bulk Wafers by Room-Temperature Photoluminescence Mapping under Deep UV Excitation",
   journal	 = "Materials Science Forum",
   year 	 = "2007",
   volume	 = "556-557",
   number	 = "",
   pages	 = "275--278"
}