@article{weko_25298_1,
   author	 = "高橋,健介 and 野平,博司 and 廣瀬,和之 and 服部,健雄",
   title	 = "Accurate determination of SiO2 film thickness by X-ray photoelectron spectroscopy",
   journal	 = "Applied Physics Letters",
   year 	 = "2003",
   volume	 = "83",
   number	 = "16",
   pages	 = "3422--3424",
   month	 = "oct"
}