@article{weko_25328_1,
   author	 = "乃万,裕一 and 高橋,宏行 and 藤岡,洋 and 尾嶋,正治 and 馬場,祐治 and 廣瀬,和之 and 丹羽,正昭 and 臼田,宏治 and 平下,紀夫",
   title	 = "Uniaxial and biaxial strain field dependence of the thermal oxidation rate of silicon",
   journal	 = "Journal of Applied Physics",
   year 	 = "2001",
   volume	 = "90",
   number	 = "10",
   pages	 = "5434--5437",
   month	 = "nov"
}