@article{weko_28155_1,
   author	 = "小川,智弘 and 江副,祐一郎 and 森山,鉄平 and 三石,郁之 and 垣内,巧也 and 大橋,隆哉 and 満田,和久 and Putkonen,Matti",
   title	 = "Iridium-Coated Micropore X-ray Optics Using Dry Etching of a Silicon Wafer and Atomic Layer Deposition",
   journal	 = "Applied Optics",
   year 	 = "2013",
   volume	 = "52",
   number	 = "24",
   pages	 = "5949--5956",
   month	 = "aug"
}