@inproceedings{weko_6889_1,
   author	 = "中村,拓磨 and 森,治 and 田中,孝治 and 松本,純 and 渡邊,元樹 and 菅原,佳城",
   title	 = "A Study on control of curvature of multilayer by sputter deposition",
   booktitle	 = "[第26回アストロダイナミクスシンポジウム講演後刷り集]",
   year 	 = "2016",
   volume	 = "",
   number	 = "",
   publisher	 = "宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)",
   month	 = "jul"
}