@inproceedings{weko_6889_1, author = "中村,拓磨 and 森,治 and 田中,孝治 and 松本,純 and 渡邊,元樹 and 菅原,佳城", title = "A Study on control of curvature of multilayer by sputter deposition", booktitle = "[第26回アストロダイナミクスシンポジウム講演後刷り集]", year = "2016", volume = "", number = "", publisher = "宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)", month = "jul" }