WEKO3
アイテム
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高重力環境下でのダイヤモンド合成におけるプラズマのその場診断
https://jaxa.repo.nii.ac.jp/records/13745
https://jaxa.repo.nii.ac.jp/records/13745905498e3-b120-49ac-86ae-3387beaa8818
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2015-03-26 | |||||
タイトル | ||||||
タイトル | 高重力環境下でのダイヤモンド合成におけるプラズマのその場診断 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ダイアモンド薄膜 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 蒸着 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | プラズマその場診断 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 結晶成長 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | プラズマスペクトル | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 重力の影響 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | DCプラズマ | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 合成ダイアモンド | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ラマンスペクトル | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 回転ドラム | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | diamond film | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | vapor deposition | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | in-situ plasma diagnostic | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | crystal growth | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | plasma spectrum | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | gravitational effect | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | DC-plasma | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | synthesized diamond | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Raman spectrum | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | rotating drum | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
その他のタイトル(英) | ||||||
その他のタイトル | In-situ plasma diagnostics of diamond synthesized in high gravity | |||||
著者 |
田中, 勇紀
× 田中, 勇紀× 高木, 喜樹× 行田, 薫× 風間, 康孝× Tappero, Fabrizio× 阿部, 宜之× Tanaka, Yuki× Takagi, Yoshiki× Gyoda, Kaoru× Kazama, Yasutaka× Tappero, Fabrizio× Abe, Yoshiyuki |
|||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
産業技術総合研究所 | ||||||
著者所属 | ||||||
産業技術総合研究所 | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
National Institute of Advanced Industrial Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
National Institute of Advanced Industrial Science and Technology | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構宇宙科学研究本部 | |||||
出版者(英) | ||||||
出版者 | Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS) | |||||
書誌情報 |
宇宙利用シンポジウム 第21回 平成16年度 en : Space Utilization Research: Proceedings of the Twenty-first Space Utilization Symposium p. 67-70, 発行日 2005-03 |
|||||
抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | The increases in the nucleation density and the crystal growth rate and change of morphology of the diamond thin films synthesized by DC-plasma CVD (Chemical Vapor Deposition) under the hypergravity condition are confirmed. To explain the reason for these effects, in-situ plasma diagnostics that enables to identify the active species in the plasma is studied. | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0048095016 |