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多チャンネルQCMを用いたディファレンシャル・スパッタリングの計測
https://jaxa.repo.nii.ac.jp/records/2089
https://jaxa.repo.nii.ac.jp/records/208950b94185-3b70-47c5-bf9d-e81e8364467a
名前 / ファイル | ライセンス | アクション |
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64642008.pdf (2.1 MB)
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Item type | テクニカルレポート / Technical Report(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
タイトル | 多チャンネルQCMを用いたディファレンシャル・スパッタリングの計測 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Ion engine, Ion optics, Grid life time, Sputtering, QCM | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_18gh | |||||
資源タイプ | technical report | |||||
その他のタイトル(英) | ||||||
その他のタイトル | Measurements of Differential Sputtering Yields Using Multi Channel Quartz Crystal Microbalance | |||||
著者 |
西村, 太一郎
× 西村, 太一郎× 小泉, 宏之× 國中, 均× 山極, 芳樹× Nishimura, Taichiro× Koizumi, Hiroyuki× Kuninaka, Hitoshi× Yamagiwa, Yoshiki |
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著者所属 | ||||||
静岡大学 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 | ||||||
著者所属(英) | ||||||
en | ||||||
Shizuoka University | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS)(JAXA) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS)(JAXA) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS)(JAXA) | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構 | |||||
出版者(英) | ||||||
出版者 | Japan Aerospace Exploration Agency (JAXA) | |||||
書誌情報 |
宇宙航空研究開発機構研究開発報告: イオン加速グリッド耐久認定用数値解析 JIEDI (JAXA Ion Engine Development Initiatives) ツールの研究開発ワークショップ論文集 en : JAXA Research and Development Report 巻 JAXA-RR-09-004, 発行日 2010-02-26 |
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会議概要(会議名, 開催地, 会期, 主催者等)(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetime | |||||
抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Life time assessment of an ion engine needs sputtering characteristics on grid material. Sputter yield on molybdenum due to xenon ion impingement was measured by a conventional weight loss technique using a miniature ion engine. New multiple Quartz crystal Microbalance (QCM) system, positioned in hemispherical on the target plane, revealed the differential sputtering yields. The resulted sputtering yields agreed with the data given by the other conventional methods. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 形態: カラー図版あり | |||||
内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Physical characteristics: Original contains color illustrations | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1349-1113 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA1192675X | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0064642008 | |||||
レポート番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | レポート番号: JAXA-RR-09-004 |