WEKO3
アイテム
{"_buckets": {"deposit": "c314c8cc-1e0c-4688-b18f-2732217be736"}, "_deposit": {"created_by": 1, "id": "24052", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "24052"}, "status": "published"}, "_oai": {"id": "oai:jaxa.repo.nii.ac.jp:00024052", "sets": ["1888"]}, "author_link": ["233330", "233334", "233335", "233324", "233327", "233328", "233331", "233326", "233339", "233332", "233318", "233338", "233333", "233319", "233321", "233325", "233337", "233320", "233322", "233323", "233329", "233336"], "item_7_biblio_info_10": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2010-02", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "6", "bibliographicPageEnd": "1011", "bibliographicPageStart": "1007", "bibliographicVolumeNumber": "49", "bibliographic_titles": [{}, {"bibliographic_title": "Applied Optics", "bibliographic_titleLang": "en"}]}]}, "item_7_description_18": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "著者人数:11名", "subitem_description_type": "Other"}]}, "item_7_description_19": {"attribute_name": "内容記述(英)", "attribute_value_mlt": [{"subitem_description": "Accepted: 2010-01-05", "subitem_description_type": "Other"}]}, "item_7_description_32": {"attribute_name": "資料番号", "attribute_value_mlt": [{"subitem_description": "資料番号: SA1000735000", "subitem_description_type": "Other"}]}, "item_7_publisher_9": {"attribute_name": "出版者(英)", "attribute_value_mlt": [{"subitem_publisher": "Optical Society of America"}]}, "item_7_relation_25": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_name": [{"subitem_relation_name_text": "info:doi/10.1364/AO.49.001007"}], "subitem_relation_type_id": {"subitem_relation_type_id_text": "http://dx.doi.org/10.1364/AO.49.001007", "subitem_relation_type_select": "DOI"}}]}, "item_7_source_id_21": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0003-6935", "subitem_source_identifier_type": "ISSN"}]}, "item_7_source_id_24": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA00543409", "subitem_source_identifier_type": "NCID"}]}, "item_7_text_20": {"attribute_name": "その他キーワード", "attribute_value_mlt": [{"subitem_text_value": "資料請求非対応"}, {"subitem_text_value": "宇宙科学研究"}, {"subitem_text_value": "宇宙理学"}]}, "item_7_text_35": {"attribute_name": "JAXAカテゴリ", "attribute_value_mlt": [{"subitem_text_value": "JAXAカテゴリ: 学術雑誌論文"}]}, "item_7_text_43": {"attribute_name": "DSpaceコレクション番号", "attribute_value_mlt": [{"subitem_text_value": "DSpaceコレクション番号: 6"}]}, "item_7_text_6": {"attribute_name": "著者所属", "attribute_value_mlt": [{"subitem_text_value": "宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系"}, {"subitem_text_value": "首都大学東京"}, {"subitem_text_value": "宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系"}, {"subitem_text_value": "宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系"}, {"subitem_text_value": "宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系"}, {"subitem_text_value": "宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系"}, {"subitem_text_value": "宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系"}, {"subitem_text_value": "首都大学東京"}, {"subitem_text_value": "首都大学東京"}, {"subitem_text_value": "産業技術総合研究所"}, {"subitem_text_value": "産業技術総合研究所"}]}, "item_7_text_7": {"attribute_name": "著者所属(英)", "attribute_value_mlt": [{"subitem_text_language": "en", "subitem_text_value": "Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Physics, Tokyo Metropolitan University"}, {"subitem_text_language": "en", "subitem_text_value": "Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)"}, {"subitem_text_language": "en", "subitem_text_value": "Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)"}, {"subitem_text_language": "en", "subitem_text_value": "Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)"}, {"subitem_text_language": "en", "subitem_text_value": "Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)"}, {"subitem_text_language": "en", "subitem_text_value": "Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Physics, Tokyo Metropolitan University"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Physics, Tokyo Metropolitan University"}, {"subitem_text_language": "en", "subitem_text_value": "National Institute of Advanced Industrial Science and Technology (AIST)"}, {"subitem_text_language": "en", "subitem_text_value": "National Institute of Advanced Industrial Science and Technology (AIST)"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "metadata only access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_14cb"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "三石, 郁之"}], "nameIdentifiers": [{"nameIdentifier": "233318", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "江副, 祐一郎"}], "nameIdentifiers": [{"nameIdentifier": "233319", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "輿石, 真樹"}], "nameIdentifiers": [{"nameIdentifier": "233320", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "三田, 信"}], "nameIdentifiers": [{"nameIdentifier": "233321", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "前田, 良知"}], "nameIdentifiers": [{"nameIdentifier": "233322", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "山崎, 典子"}], "nameIdentifiers": [{"nameIdentifier": "233323", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "満田, 和久"}], "nameIdentifiers": [{"nameIdentifier": "233324", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "白田, 渉雪"}], "nameIdentifiers": [{"nameIdentifier": "233325", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "林, 多佳由"}], "nameIdentifiers": [{"nameIdentifier": "233326", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "高野, 貴之"}], "nameIdentifiers": [{"nameIdentifier": "233327", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "前田, 龍太郎"}], "nameIdentifiers": [{"nameIdentifier": "233328", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Mitsuishi, Ikuyuki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233329", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ezoe, Yuichiro", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233330", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Koshiishi, Masaki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233331", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Mita, Makoto", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233332", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Maeda, Yoshitomo", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233333", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yamasaki, Noriko Y.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233334", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Mitsuda, Kazuhisa", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233335", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Shirata, Takayuki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233336", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Hayashi, Takayuki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233337", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takano, Takayuki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233338", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Maeda, Ryutaro", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "233339", "nameIdentifierScheme": "WEKO"}]}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Evaluation of the soft X-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Evaluation of the soft X-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers", "subitem_title_language": "en"}]}, "item_type_id": "7", "owner": "1", "path": ["1888"], "permalink_uri": "https://jaxa.repo.nii.ac.jp/records/24052", "pubdate": {"attribute_name": "公開日", "attribute_value": "2015-03-26"}, "publish_date": "2015-03-26", "publish_status": "0", "recid": "24052", "relation": {}, "relation_version_is_last": true, "title": ["Evaluation of the soft X-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers"], "weko_shared_id": -1}
Evaluation of the soft X-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers
https://jaxa.repo.nii.ac.jp/records/24052
https://jaxa.repo.nii.ac.jp/records/24052539daa70-3d86-46df-89e4-5c56e64960d4
Item type | 学術雑誌論文 / Journal Article(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Evaluation of the soft X-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
三石, 郁之
× 三石, 郁之× 江副, 祐一郎× 輿石, 真樹× 三田, 信× 前田, 良知× 山崎, 典子× 満田, 和久× 白田, 渉雪× 林, 多佳由× 高野, 貴之× 前田, 龍太郎× Mitsuishi, Ikuyuki× Ezoe, Yuichiro× Koshiishi, Masaki× Mita, Makoto× Maeda, Yoshitomo× Yamasaki, Noriko Y.× Mitsuda, Kazuhisa× Shirata, Takayuki× Hayashi, Takayuki× Takano, Takayuki× Maeda, Ryutaro |
|||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) 高エネルギー天文学研究系 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
産業技術総合研究所 | ||||||
著者所属 | ||||||
産業技術総合研究所 | ||||||
著者所属(英) | ||||||
en | ||||||
Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of High Energy Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
National Institute of Advanced Industrial Science and Technology (AIST) | ||||||
著者所属(英) | ||||||
en | ||||||
National Institute of Advanced Industrial Science and Technology (AIST) | ||||||
出版者(英) | ||||||
出版者 | Optical Society of America | |||||
書誌情報 |
en : Applied Optics 巻 49, 号 6, p. 1007-1011, 発行日 2010-02 |
|||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 著者人数:11名 | |||||
内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Accepted: 2010-01-05 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0003-6935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1364/AO.49.001007 | |||||
関連名称 | info:doi/10.1364/AO.49.001007 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: SA1000735000 |