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A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining
https://jaxa.repo.nii.ac.jp/records/26409
https://jaxa.repo.nii.ac.jp/records/26409e21bc78f-e9ce-471b-b084-ad8ca5c8b8b9
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
山根, 大輔
× 山根, 大輔× Sun, Winston× 清田, 晴信× 川崎, 繁男× 藤田, 博之× 年吉, 洋× Yamane, Daisuke× Sun, Winston× Seita, Harunobu× Kawasaki, Shigeo× Fujita, Hiroyuki× Toshiyoshi, Hiroshi |
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著者所属 | ||||||
東京大学 | ||||||
著者所属 | ||||||
東京大学 | ||||||
著者所属 | ||||||
京都大学 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS) | ||||||
著者所属 | ||||||
東京大学 | ||||||
著者所属 | ||||||
東京大学 | ||||||
著者所属(英) | ||||||
en | ||||||
Research Center for Advanced Science and Technology, The University of Tokyo : Institute of Industrial Science, The University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Research Center for Advanced Science and Technology, The University of Tokyo : Institute of Industrial Science, The University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Research Institute for Sustainable Humanosphere, Kyoto University | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Industrial Science, The University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Research Center for Advanced Science and Technology, The University of Tokyo : Institute of Industrial Science, The University of Tokyo | ||||||
出版者(英) | ||||||
出版者 | Institute of Electrical and Electronics Engineers, Inc. | |||||
書誌情報 |
en : Journal of Microelectromechanical Systems 巻 20, 号 5, p. 1211-1221, 発行日 2011-10 |
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内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Accepted: 2011-06-17 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1057-7157 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10821111 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1109/JMEMS.2011.2162490 | |||||
関連名称 | info:doi/10.1109/JMEMS.2011.2162490 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: SA1003111000 |