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An Ohmic Contact Type RF-MEMS Switch Having Au-Au/CNTs Contacts
https://jaxa.repo.nii.ac.jp/records/39587
https://jaxa.repo.nii.ac.jp/records/39587b7faf35d-b3f4-4295-abe5-06997294f1e2
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2017-10-27 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | An Ohmic Contact Type RF-MEMS Switch Having Au-Au/CNTs Contacts | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | RF-MEMS switch | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Ohmic contact | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | CNT | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | reliability | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
影山, 智明
× 影山, 智明× 篠崎, 孝一× 張, 嵐× 魯, 健× 高木, 秀樹× 李, 相錫× Kageyama, Tomoaki× Shinozaki, Koichi× Zhang, Lan× Lu, Jian× Takaki, Hideki× Lee, Sang-Seok |
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著者所属 | ||||||
鳥取大学 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構(JAXA) | ||||||
著者所属 | ||||||
産業技術総合研究所集積マイクロシステム研究センター(AIST) | ||||||
著者所属 | ||||||
産業技術総合研究所集積マイクロシステム研究センター(AIST) | ||||||
著者所属 | ||||||
産業技術総合研究所集積マイクロシステム研究センター(AIST) | ||||||
著者所属 | ||||||
鳥取大学 | ||||||
著者所属(英) | ||||||
en | ||||||
Tottori University | ||||||
著者所属(英) | ||||||
en | ||||||
Japan Aerospace Exploration Agency (JAXA) | ||||||
著者所属(英) | ||||||
en | ||||||
Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (AIST) | ||||||
著者所属(英) | ||||||
en | ||||||
Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (AIST) | ||||||
著者所属(英) | ||||||
en | ||||||
Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (AIST) | ||||||
著者所属(英) | ||||||
en | ||||||
Tottori University | ||||||
出版者(英) | ||||||
出版者 | Institute of Electrical and Electronics Engineers (IEEE) | |||||
書誌情報 |
en : Proceedings of the IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) p. 287-290, 発行日 2017 |
|||||
会議概要(会議名, 開催地, 会期, 主催者等)(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (April 9-12, 2017. UCLA Meyer & Renee Luskin Conference Center), Los Angeles, California, USA | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 形態: カラー図版あり | |||||
内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Physical characteristics: Original contains color illustrations | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 2474-3755 | |||||
ISBN | ||||||
識別子タイプ | ISBN | |||||
関連識別子 | 978-1-5090-3059-0 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1109/NEMS.2017.8017026 | |||||
関連名称 | info:doi/10.1109/NEMS.2017.8017026 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: PA1710065000 | |||||
レポート番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | レポート番号: CFP17NME-ART |