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{"_buckets": {"deposit": "93397011-a7f3-4a9c-8799-ddb0930b0581"}, "_deposit": {"created_by": 1, "id": "6711", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "6711"}, "status": "published"}, "_oai": {"id": "oai:jaxa.repo.nii.ac.jp:00006711", "sets": ["1545", "1891"]}, "author_link": ["34453", "34452", "34450", "34451", "34455", "34454", "34456", "34457"], "item_5_alternative_title_1": {"attribute_name": "その他のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "スパッタリング法による多層膜の形状制御に関する研究"}]}, "item_5_biblio_info_10": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2018-07", "bibliographicIssueDateType": "Issued"}, "bibliographic_titles": [{"bibliographic_title": "[第28回アストロダイナミクスシンポジウム講演後刷り集]"}, {"bibliographic_title": "The 28th Workshop on JAXA Astrodynamics and Flight Mechanics", "bibliographic_titleLang": "en"}]}]}, "item_5_description_14": {"attribute_name": "会議概要(会議名, 開催地, 会期, 主催者等)", "attribute_value_mlt": [{"subitem_description": "第28回アストロダイナミクスシンポジウム (2018年7月30-31日. 宇宙航空研究開発機構宇宙科学研究所), 相模原市, 神奈川県", "subitem_description_type": "Other"}]}, "item_5_description_15": {"attribute_name": "会議概要(会議名, 開催地, 会期, 主催者等)(英)", "attribute_value_mlt": [{"subitem_description": "The 28th Workshop on JAXA Astrodynamics and Flight Mechanics 2018 (July 30-31, 2018. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)), Sagamihara, Kanagawa Japan", "subitem_description_type": "Other"}]}, "item_5_description_32": {"attribute_name": "資料番号", "attribute_value_mlt": [{"subitem_description": "資料番号: SA6000135023", "subitem_description_type": "Other"}]}, "item_5_description_33": {"attribute_name": "レポート番号", "attribute_value_mlt": [{"subitem_description": "レポート番号: A-23", "subitem_description_type": "Other"}]}, "item_5_publisher_8": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)"}]}, "item_5_publisher_9": {"attribute_name": "出版者(英)", "attribute_value_mlt": [{"subitem_publisher": "Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS)"}]}, "item_5_text_35": {"attribute_name": "JAXAカテゴリ", "attribute_value_mlt": [{"subitem_text_value": "JAXAカテゴリ: シンポジウム・研究会"}]}, "item_5_text_36": {"attribute_name": "JAXAカテゴリ2", "attribute_value_mlt": [{"subitem_text_value": "JAXAカテゴリ2: IS"}]}, "item_5_text_42": {"attribute_name": "シンポジウム区分", "attribute_value_mlt": [{"subitem_text_value": "シンポジウム区分: 001"}]}, "item_5_text_43": {"attribute_name": "DSpaceコレクション番号", "attribute_value_mlt": [{"subitem_text_value": "DSpaceコレクション番号: 11"}]}, "item_5_text_6": {"attribute_name": "著者所属", "attribute_value_mlt": [{"subitem_text_value": "青山学院大学"}, {"subitem_text_value": "宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)"}, {"subitem_text_value": "宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)"}, {"subitem_text_value": "青山学院大学"}]}, "item_5_text_7": {"attribute_name": "著者所属(英)", "attribute_value_mlt": [{"subitem_text_language": "en", "subitem_text_value": "Department of Science and Engineering, Aoyama Gakuin University"}, {"subitem_text_language": "en", "subitem_text_value": "Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS)"}, {"subitem_text_language": "en", "subitem_text_value": "Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS)"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Science and Engineering, Aoyama Gakuin University"}]}, "item_5_version_type_30": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_ab4af688f83e57aa", "subitem_version_type": "AM"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "池田, 崚太"}], "nameIdentifiers": [{"nameIdentifier": "34450", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "森, 治"}], "nameIdentifiers": [{"nameIdentifier": "34451", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "佐藤, 泰貴"}], "nameIdentifiers": [{"nameIdentifier": "34452", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "菅原, 佳城"}], "nameIdentifiers": [{"nameIdentifier": "34453", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ikeda, Ryota", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "34454", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Mori, Osamu", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "34455", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sato, Yasutaka", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "34456", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sugawara, Yoshiki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "34457", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2020-01-16"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "SA6000135023.pdf", "filesize": [{"value": "607.2 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 607200.0, "url": {"label": "SA6000135023.pdf", "url": "https://jaxa.repo.nii.ac.jp/record/6711/files/SA6000135023.pdf"}, "version_id": "8a0e7c46-dae0-4bb7-8a84-5f322e41e96f"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "Sputtering", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Curvature Control", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Membrane Structures", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Multi-layer", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Internal Stress", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "A study on Curvature Control of Multi-Layer Film by Sputtering", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "A study on Curvature Control of Multi-Layer Film by Sputtering", "subitem_title_language": "en"}]}, "item_type_id": "5", "owner": "1", "path": ["1545", "1891"], "permalink_uri": "https://jaxa.repo.nii.ac.jp/records/6711", "pubdate": {"attribute_name": "公開日", "attribute_value": "2019-06-10"}, "publish_date": "2019-06-10", "publish_status": "0", "recid": "6711", "relation": {}, "relation_version_is_last": true, "title": ["A study on Curvature Control of Multi-Layer Film by Sputtering"], "weko_shared_id": -1}
A study on Curvature Control of Multi-Layer Film by Sputtering
https://jaxa.repo.nii.ac.jp/records/6711
https://jaxa.repo.nii.ac.jp/records/67112a408ef0-5685-4f8d-a3ad-ec087412a65e
名前 / ファイル | ライセンス | アクション |
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SA6000135023.pdf (607.2 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2019-06-10 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | A study on Curvature Control of Multi-Layer Film by Sputtering | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Sputtering | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Curvature Control | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Membrane Structures | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Multi-layer | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Internal Stress | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
その他のタイトル | ||||||
その他のタイトル | スパッタリング法による多層膜の形状制御に関する研究 | |||||
著者 |
池田, 崚太
× 池田, 崚太× 森, 治× 佐藤, 泰貴× 菅原, 佳城× Ikeda, Ryota× Mori, Osamu× Sato, Yasutaka× Sugawara, Yoshiki |
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著者所属 | ||||||
青山学院大学 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS) | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS) | ||||||
著者所属 | ||||||
青山学院大学 | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Science and Engineering, Aoyama Gakuin University | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Science and Engineering, Aoyama Gakuin University | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS) | |||||
出版者(英) | ||||||
出版者 | Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS) | |||||
書誌情報 |
[第28回アストロダイナミクスシンポジウム講演後刷り集] en : The 28th Workshop on JAXA Astrodynamics and Flight Mechanics 発行日 2018-07 |
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会議概要(会議名, 開催地, 会期, 主催者等) | ||||||
内容記述タイプ | Other | |||||
内容記述 | 第28回アストロダイナミクスシンポジウム (2018年7月30-31日. 宇宙航空研究開発機構宇宙科学研究所), 相模原市, 神奈川県 | |||||
会議概要(会議名, 開催地, 会期, 主催者等)(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | The 28th Workshop on JAXA Astrodynamics and Flight Mechanics 2018 (July 30-31, 2018. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)), Sagamihara, Kanagawa Japan | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: SA6000135023 | |||||
レポート番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | レポート番号: A-23 |