Teikyo University of Science and Technology
Teikyo University of Science and Technology
Teikyo University of Science and Technology
Teikyo University of Science and Technology
National Institute of Advanced Industrial Science and Technology
National Institute of Advanced Industrial Science and Technology
出版者
宇宙航空研究開発機構宇宙科学研究本部
出版者（英）
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS)
雑誌名
宇宙利用シンポジウム 第21回 平成16年度
雑誌名(英)
Space Utilization Research: Proceedings of the Twenty-first Space Utilization Symposium
ページ
67 - 70
発行年
2005-03
抄録（英）
The increases in the nucleation density and the crystal growth rate and change of morphology of the diamond thin films synthesized by DC-plasma CVD (Chemical Vapor Deposition) under the hypergravity condition are confirmed. To explain the reason for these effects, in-situ plasma diagnostics that enables to identify the active species in the plasma is studied.
高重力環境下でのダイヤモンド合成におけるプラズマのその場診断
