Teikyo University of Science and Technology
Teikyo University of Science and Technology
Teikyo University of Science and Technology
Teikyo University of Science and Technology
Teikyo University of Science and Technology
Teikyo University of Science and Technology
出版者
宇宙航空研究開発機構宇宙科学研究本部
出版者（英）
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS)
雑誌名
宇宙利用シンポジウム 第20回 平成15年度
雑誌名(英)
Space Utilization Research: Proceedings of the Twentieth Space Utilization Symposium
ページ
216 - 219
発行年
2004-03
抄録（英）
Although it was confirmed that nucleation density and crystal growth rate in the diamond thin films by means of DC-plasma CVD were increased with increasing gravity, the reasons of these effects have not clearly been explained. To this end, an OES (optical emission spectroscopy) apparatus was installed in the high gravity equipment. In-situ plasma diagnostics enabled identification of the active species in the plasma, and a series of experiments were conducted for various experimental conditions with gravity, substrate temperatures, and methane concentration as the parameters.
高重力環境下におけるプラズマの発光分光のその場診断:ダイヤモンドCVD合成への応用
