2026-03-14T16:30:51Z https://jaxa.repo.nii.ac.jp/oai

oai:jaxa.repo.nii.ac.jp:00024143 2023-06-21T02:55:38Z 1887:1888

Switched-Layer Design for SOI Bulk Micromachined XYZ Stage Using Stiction Bar for Interlayer Electrical Connection 高橋, 一浩 三田, 信 藤田, 博之 年吉, 洋 Takahashi, K. Mita, M. Fujita, H. Toshiyoshi, H. 資料番号: SA1000828000 journal article Institute of Electrical and Electronics Engineers 2009-08 Journal of Microelectromechanical Systems 4 18 818 827 1057-7157 AA10821111 https://jaxa.repo.nii.ac.jp/records/24143 eng info:doi/10.1109/JMEMS.2009.2018371 http://dx.doi.org/10.1109/JMEMS.2009.2018371 metadata only access