{"created":"2023-06-20T14:44:01.358906+00:00","id":11411,"links":{},"metadata":{"_buckets":{"deposit":"ce31e1f4-22e4-409e-ac40-c1464de2a1a9"},"_deposit":{"created_by":1,"id":"11411","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"11411"},"status":"published"},"_oai":{"id":"oai:jaxa.repo.nii.ac.jp:00011411","sets":["1543:1580:1594","1887:1891"]},"author_link":["100304","100307","100306","100309","100311","100305","100310","100308","100312","100313"],"item_5_alternative_title_2":{"attribute_name":"その他のタイトル（英）","attribute_value_mlt":[{"subitem_alternative_title":"Development of a composite multilayer X-ray reflecting mirror using an ion beam sputtering equipment"}]},"item_5_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2005-09","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"665","bibliographicPageStart":"662","bibliographic_titles":[{"bibliographic_title":"第5回宇宙科学シンポジウム"},{"bibliographic_title":"Proceedings of the 5th Space Science Symposium","bibliographic_titleLang":"en"}]}]},"item_5_description_16":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"X線望遠鏡の反射鏡には広いエネルギー範囲でより高い反射率をもつ反射鏡が必要である。従来のDCマグネトロンスパッタ法と比較して、イオンビームスパッタ法は、より高い真空中での成膜が可能であるため、より純粋で膜質の良い多層膜反射鏡が製作できると言われている。また多数の物質を容易に成膜することが可能であり、反射率が高く広いエネルギー領域で反射可能な反射鏡の製作が可能となる。数百時間連続稼働可能であるRF型イオンビームスパッタリング装置を導入した。ここではRF型イオンビームスパッタリング装置を用いて製作したPt/C多層膜の性能について報告するとともに、イオンビームスパッタリング装置の様々な利点を生かした反射鏡の開発について述べる。","subitem_description_type":"Abstract"}]},"item_5_description_32":{"attribute_name":"資料番号","attribute_value_mlt":[{"subitem_description":"資料番号: AA0049122157","subitem_description_type":"Other"}]},"item_5_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宇宙航空研究開発機構宇宙科学研究本部"}]},"item_5_publisher_9":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS)"}]},"item_5_text_6":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"名古屋大学"},{"subitem_text_value":"名古屋大学"},{"subitem_text_value":"名古屋大学"},{"subitem_text_value":"名古屋大学"},{"subitem_text_value":"名古屋大学"}]},"item_5_text_7":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Nagoya University"},{"subitem_text_language":"en","subitem_text_value":"Nagoya University"},{"subitem_text_language":"en","subitem_text_value":"Nagoya University"},{"subitem_text_language":"en","subitem_text_value":"Nagoya University"},{"subitem_text_language":"en","subitem_text_value":"Nagoya University"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"酒井, 知晶"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"山田, 伸明"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"田村, 啓輔"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"小賀坂, 康志"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"山下, 広順"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Sakai, Chiaki","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yamada, Nobuaki","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Tamura, Keisuke","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ogasaka, Yasushi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yamashita, Kojun","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"X線望遠鏡","subitem_subject_scheme":"Other"},{"subitem_subject":"反射鏡","subitem_subject_scheme":"Other"},{"subitem_subject":"反射率","subitem_subject_scheme":"Other"},{"subitem_subject":"白金","subitem_subject_scheme":"Other"},{"subitem_subject":"ニッケル","subitem_subject_scheme":"Other"},{"subitem_subject":"炭素","subitem_subject_scheme":"Other"},{"subitem_subject":"多層膜スーパーミラー","subitem_subject_scheme":"Other"},{"subitem_subject":"イオンビームスパッタリング","subitem_subject_scheme":"Other"},{"subitem_subject":"吸収端","subitem_subject_scheme":"Other"},{"subitem_subject":"スパッタリング","subitem_subject_scheme":"Other"},{"subitem_subject":"イオンビーム","subitem_subject_scheme":"Other"},{"subitem_subject":"硬X線","subitem_subject_scheme":"Other"},{"subitem_subject":"軟X線","subitem_subject_scheme":"Other"},{"subitem_subject":"X-ray telescope","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"mirror","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"reflectance","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"platinum","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"nickel","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"carbon","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"multilayer supermirror","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"ion beam sputtering","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"absorption edge","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"sputtering","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"ion beam","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"hard X-ray","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"soft X-ray","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"イオンビームスパッタリング装置を用いた複合多層膜X線反射鏡の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"イオンビームスパッタリング装置を用いた複合多層膜X線反射鏡の開発"}]},"item_type_id":"5","owner":"1","path":["1594","1891"],"pubdate":{"attribute_name":"公開日","attribute_value":"2015-03-26"},"publish_date":"2015-03-26","publish_status":"0","recid":"11411","relation_version_is_last":true,"title":["イオンビームスパッタリング装置を用いた複合多層膜X線反射鏡の開発"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-06-21T06:37:43.004966+00:00"}