{"created":"2023-06-20T14:44:09.205453+00:00","id":11557,"links":{},"metadata":{"_buckets":{"deposit":"c2b0933a-7f30-40d6-813d-b9021648c618"},"_deposit":{"created_by":1,"id":"11557","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"11557"},"status":"published"},"_oai":{"id":"oai:jaxa.repo.nii.ac.jp:00011557","sets":["1543:1580:1595","1887:1891"]},"author_link":["101968","101973","101970","101966","101972","101971","101969","101975","101974","101967"],"item_5_alternative_title_2":{"attribute_name":"その他のタイトル（英）","attribute_value_mlt":[{"subitem_alternative_title":"Performance improvement of a multilayer film by ion beams"}]},"item_5_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2004-08","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"506","bibliographicPageStart":"503","bibliographic_titles":[{"bibliographic_title":"第4回宇宙科学シンポジウム"},{"bibliographic_title":"Proceedings of the 4th Space Science Symposium","bibliographic_titleLang":"en"}]}]},"item_5_description_16":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"現在、研究室ではDCマグネトロンスパッタリング装置を使った多層膜X線反射鏡の製作を行っている。天体からの微弱なX線を望遠鏡によって捕らえるには、より反射率の高い反射鏡が必要である。反射率を上げるためには、多層膜の膜質の改善、反射率の高い多層膜の設計が必要である。ここではイオンビームスパッタリング装置の様々な利点を生かし、多層膜の高性能化を行った。","subitem_description_type":"Abstract"}]},"item_5_description_32":{"attribute_name":"資料番号","attribute_value_mlt":[{"subitem_description":"資料番号: AA0047899121","subitem_description_type":"Other"}]},"item_5_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宇宙航空研究開発機構宇宙科学研究本部"}]},"item_5_publisher_9":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS)"}]},"item_5_text_6":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"名古屋大学"},{"subitem_text_value":"名古屋大学"},{"subitem_text_value":"名古屋大学"},{"subitem_text_value":"名古屋大学"},{"subitem_text_value":"名古屋大学"}]},"item_5_text_7":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Nagoya University"},{"subitem_text_language":"en","subitem_text_value":"Nagoya University"},{"subitem_text_language":"en","subitem_text_value":"Nagoya University"},{"subitem_text_language":"en","subitem_text_value":"Nagoya University"},{"subitem_text_language":"en","subitem_text_value":"Nagoya University"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"酒井, 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telescope","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"supermirror","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"X-ray optics","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"performance improvement","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"ion beam","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"reflectance","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"surface treatment","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"multilayer film","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference 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