@inproceedings{oai:jaxa.repo.nii.ac.jp:00013510,
 author = {渡邉, 匡人 and 中野, 禅 and 明渡, 純 and Watanabe, Masahito and Nakano, Shizuka and Akedo, Jun},
 book = {宇宙利用シンポジウム　第23回　平成18年度, Space Utilization Research: Proceedings of the Twenty-third Space Utilization Symposium},
 month = {Mar},
 note = {In this research, we clarify the aerosol dynamics during thin film formation by using the Aerosol Deposition (AD) technique under the microgravity conditions. The aerosol deposition technique is useful for making thin film of ceramics materials. We are now trying this technique to make thin film of thermally unstable materials, such as clathrate compounds and/or amorphous materials. However, it is difficult to make homogeneously the aerosol of these materials in the terrestrial conditions, because in the terrestrial conditions the fine particles of these materials are settled down below the chamber during making its aerosol. Thus, in the microgravity conditions, we hope to make homogeneously aerosol for good quality of thin film by the aerosol deposition technique. For this purpose, we developed the system of AD technique under microgravity conditions during parabolic flight by airplane. Using the system, we succeeded to make thin films of (Pb (Ti, Zr) O3)(PZT(Lead Zirconate Titanate)) by the AD technique under microgravity conditions. From present results, we discussed about the relationship between aerosol flow and deposition conditions under microgravity conditions., 資料番号: AA0063349012},
 pages = {43--46},
 publisher = {宇宙航空研究開発機構宇宙科学研究本部, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS)},
 title = {微小重力下におけるエアロゾル・デポジション法による薄膜形成},
 year = {2007}
}