{"created":"2023-06-20T14:49:41.473539+00:00","id":17607,"links":{},"metadata":{"_buckets":{"deposit":"a0c1397f-c77c-4f61-aa3f-a925dc6eebac"},"_deposit":{"created_by":1,"id":"17607","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"17607"},"status":"published"},"_oai":{"id":"oai:jaxa.repo.nii.ac.jp:00017607","sets":["1543:1712:1725","1887:1891"]},"author_link":["159129","159128"],"item_5_alternative_title_2":{"attribute_name":"その他のタイトル（英）","attribute_value_mlt":[{"subitem_alternative_title":"Future of MEMS"}]},"item_5_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2003-05","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"11","bibliographicPageStart":"3","bibliographic_titles":[{"bibliographic_title":"第13回高温エレクトロニクス研究会"},{"bibliographic_title":"Proceedings of the 13th ISAS Research Meeting on High Temperature Electronics","bibliographic_titleLang":"en"}]}]},"item_5_description_16":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"MEMS(Micro ElectroMechanical Systems)(微小電気機械システム)は、電子回路だけでなくセンサやアクチュエータのような異なる要素をシリコン基板上などに集積化したもので、小形でありながら複雑で高度な働きをする。半導体集積回路の製造技術を基本にし、電子、機械、光、材料などの多様な技術を融合した「マイクロマシニング」と呼ばれる微細加工技術で製作され、情報通信(通信用光スイッチなど)、自動車・家電(ジャイロなど)、産業機械(LSIプローバなど)・医学・バイオ(カテーテルなど)、環境・防災(赤外線センサなど)のような広い分野で、高付加価値の基幹部品として使われる。その具体例として、静電浮上による加速度センサと回転ジャイロ、ガラス貫通配線とそれを用いたウェハプローバ用コンダクタ、マルチプローブデー夕ストレージシステム、マルチ鏡筒低エネルギー電子ビーム露光装置、チップ上のマイクロ波フィルターやスイッチなどの高周波用MEMSデバイス、ナノ構造による高感度センシングデバイス、超小形ガスタービン発電器などのマイクロエネルギ源や固体ロケットマイクロスラスタ、最後にMEMSの問題点として多品種少量生産に触れる。","subitem_description_type":"Abstract"}]},"item_5_description_32":{"attribute_name":"資料番号","attribute_value_mlt":[{"subitem_description":"資料番号: AA0045917001","subitem_description_type":"Other"}]},"item_5_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宇宙科学研究所"}]},"item_5_publisher_9":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"The Institute of Space and Astronautical Science (ISAS)"}]},"item_5_text_6":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"東北大学 未来科学技術共同研究センター"}]},"item_5_text_7":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Tohoku University New Industry Creation Hatchery Center"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"江刺, 正喜"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Esashi, Masayoshi","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"MEMS","subitem_subject_scheme":"Other"},{"subitem_subject":"電子回路","subitem_subject_scheme":"Other"},{"subitem_subject":"アクチュエータ","subitem_subject_scheme":"Other"},{"subitem_subject":"Si基板","subitem_subject_scheme":"Other"},{"subitem_subject":"半導体デバイス","subitem_subject_scheme":"Other"},{"subitem_subject":"IC","subitem_subject_scheme":"Other"},{"subitem_subject":"マイクロマシーニング","subitem_subject_scheme":"Other"},{"subitem_subject":"マイクロストラクチャー","subitem_subject_scheme":"Other"},{"subitem_subject":"マイクロフィルター","subitem_subject_scheme":"Other"},{"subitem_subject":"マイクロスラスト","subitem_subject_scheme":"Other"},{"subitem_subject":"ナノ技術","subitem_subject_scheme":"Other"},{"subitem_subject":"カテーテル","subitem_subject_scheme":"Other"},{"subitem_subject":"MEMS","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"electronic circuit","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"actuator","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Si substrate","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"semiconductor device","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"IC","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"micromachining","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"microstructure","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"microwave filter","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"microthrust","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"nanotechnology","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"catheter","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"MEMSの可能性","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"MEMSの可能性"}]},"item_type_id":"5","owner":"1","path":["1725","1891"],"pubdate":{"attribute_name":"公開日","attribute_value":"2015-03-26"},"publish_date":"2015-03-26","publish_status":"0","recid":"17607","relation_version_is_last":true,"title":["MEMSの可能性"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-06-21T04:35:52.359617+00:00"}