{"created":"2023-06-20T14:35:48.362463+00:00","id":2085,"links":{},"metadata":{"_buckets":{"deposit":"f87b6519-95a4-4cb7-9fdc-d043390d69c3"},"_deposit":{"created_by":1,"id":"2085","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"2085"},"status":"published"},"_oai":{"id":"oai:jaxa.repo.nii.ac.jp:00002085","sets":["1887:1893","9:10:121:127"]},"author_link":["3090","3087","3094","3093","3088","3086","3092","3095","3091","3089"],"item_3_alternative_title_2":{"attribute_name":"その他のタイトル（英）","attribute_value_mlt":[{"subitem_alternative_title":"Effect of accumulation of incident particles into a target material on sputtering under low-energy ion bombardment"}]},"item_3_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2010-02-26","bibliographicIssueDateType":"Issued"},"bibliographicVolumeNumber":"JAXA-RR-09-004","bibliographic_titles":[{"bibliographic_title":"宇宙航空研究開発機構研究開発報告: イオン加速グリッド耐久認定用数値解析 JIEDI (JAXA Ion Engine Development Initiatives) ツールの研究開発ワークショップ論文集"},{"bibliographic_title":"JAXA Research and Development Report","bibliographic_titleLang":"en"}]}]},"item_3_description_15":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）（英）","attribute_value_mlt":[{"subitem_description":"Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetime","subitem_description_type":"Other"}]},"item_3_description_17":{"attribute_name":"抄録（英）","attribute_value_mlt":[{"subitem_description":"The sputtering yields of carbon have been measured during xenon ion bombardment under the threshold energy predicted by the theory at normal incidence. The theoretical threshold energy is 160.84 eV for the xenon-carbon combination. These experimental results are different from the semi-empirical formula proposed by Yamamura and Tawara. We have calculated the sputtering yields of carbon under the xenon ion bombardment with a Monte Carlo code ACAT which is based on the binary collision approximation. The yields of carbon calculated with ACAT are in good agreement with the semi-empirical formula, but differ from the experiments under low-energy xenon bombardment. This discrepancy is believed to be due to the accumulation of xenon onto graphite. The semi-empirical formula and the above ACAT results do not consider this accumulation. In order to quantify this effect, we have calculated with ACAT for the carbon - xenon composite material as a function of xenon concentration. The results of ACAT with 14% xenon atoms in graphite are in good agreement with the experimental data.","subitem_description_type":"Other"}]},"item_3_description_18":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"形態: カラー図版あり","subitem_description_type":"Other"}]},"item_3_description_19":{"attribute_name":"内容記述（英）","attribute_value_mlt":[{"subitem_description":"Physical characteristics: Original contains color illustrations","subitem_description_type":"Other"}]},"item_3_description_32":{"attribute_name":"資料番号","attribute_value_mlt":[{"subitem_description":"資料番号: AA0064642004","subitem_description_type":"Other"}]},"item_3_description_33":{"attribute_name":"レポート番号","attribute_value_mlt":[{"subitem_description":"レポート番号: JAXA-RR-09-004","subitem_description_type":"Other"}]},"item_3_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宇宙航空研究開発機構"}]},"item_3_publisher_9":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"Japan Aerospace Exploration Agency (JAXA)"}]},"item_3_source_id_21":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1349-1113","subitem_source_identifier_type":"ISSN"}]},"item_3_source_id_24":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA1192675X","subitem_source_identifier_type":"NCID"}]},"item_3_text_6":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"同志社大学"},{"subitem_text_value":"同志社大学"},{"subitem_text_value":"岡山大学"},{"subitem_text_value":"岡山理科大学"},{"subitem_text_value":"崇城大学"}]},"item_3_text_7":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Doshisha University"},{"subitem_text_language":"en","subitem_text_value":"Doshisha University"},{"subitem_text_language":"en","subitem_text_value":"Okayama University"},{"subitem_text_language":"en","subitem_text_value":"Okayama University of Science"},{"subitem_text_language":"en","subitem_text_value":"Sojo University"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"剣持, 貴弘"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"和田, 元"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"百武, 徹"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"村本, 哲也"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"西田, 迪雄"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kenmotsu, Takahiro","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Wada, Motoi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Hyakutake, Toru","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Muramoto, Tetsuya","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nishida, Michio","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-01-15"}],"displaytype":"detail","filename":"64642004.pdf","filesize":[{"value":"677.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"64642004.pdf","url":"https://jaxa.repo.nii.ac.jp/record/2085/files/64642004.pdf"},"version_id":"bb5782e2-e5e1-48f3-ae9c-f07bb6f89f42"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Sputtering, Grid Erosion, Accumulation of Xe, JIEDI Tool","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"technical report","resourceuri":"http://purl.org/coar/resource_type/c_18gh"}]},"item_title":"低エネルギーカーボンスパッタリングに関するXe蓄積効果","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"低エネルギーカーボンスパッタリングに関するXe蓄積効果"}]},"item_type_id":"3","owner":"1","path":["127","1893"],"pubdate":{"attribute_name":"公開日","attribute_value":"2015-03-26"},"publish_date":"2015-03-26","publish_status":"0","recid":"2085","relation_version_is_last":true,"title":["低エネルギーカーボンスパッタリングに関するXe蓄積効果"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-06-21T09:28:54.757147+00:00"}