{"created":"2023-06-20T14:35:48.597737+00:00","id":2089,"links":{},"metadata":{"_buckets":{"deposit":"3abebbcf-50af-4216-9f00-ab2e638a4cb1"},"_deposit":{"created_by":1,"id":"2089","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"2089"},"status":"published"},"_oai":{"id":"oai:jaxa.repo.nii.ac.jp:00002089","sets":["1887:1893","9:10:121:127"]},"author_link":["3125","3129","3122","3126","3127","3123","3128","3124"],"item_3_alternative_title_2":{"attribute_name":"その他のタイトル（英）","attribute_value_mlt":[{"subitem_alternative_title":"Measurements of Differential Sputtering Yields Using Multi Channel Quartz Crystal Microbalance"}]},"item_3_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2010-02-26","bibliographicIssueDateType":"Issued"},"bibliographicVolumeNumber":"JAXA-RR-09-004","bibliographic_titles":[{"bibliographic_title":"宇宙航空研究開発機構研究開発報告: イオン加速グリッド耐久認定用数値解析 JIEDI (JAXA Ion Engine Development Initiatives) ツールの研究開発ワークショップ論文集"},{"bibliographic_title":"JAXA Research and Development Report","bibliographic_titleLang":"en"}]}]},"item_3_description_15":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）（英）","attribute_value_mlt":[{"subitem_description":"Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetime","subitem_description_type":"Other"}]},"item_3_description_17":{"attribute_name":"抄録（英）","attribute_value_mlt":[{"subitem_description":"Life time assessment of an ion engine needs sputtering characteristics on grid material. Sputter yield on molybdenum due to xenon ion impingement was measured by a conventional weight loss technique using a miniature ion engine. New multiple Quartz crystal Microbalance (QCM) system, positioned in hemispherical on the target plane, revealed the differential sputtering yields. The resulted sputtering yields agreed with the data given by the other conventional methods.","subitem_description_type":"Other"}]},"item_3_description_18":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"形態: カラー図版あり","subitem_description_type":"Other"}]},"item_3_description_19":{"attribute_name":"内容記述（英）","attribute_value_mlt":[{"subitem_description":"Physical characteristics: Original contains color illustrations","subitem_description_type":"Other"}]},"item_3_description_32":{"attribute_name":"資料番号","attribute_value_mlt":[{"subitem_description":"資料番号: AA0064642008","subitem_description_type":"Other"}]},"item_3_description_33":{"attribute_name":"レポート番号","attribute_value_mlt":[{"subitem_description":"レポート番号: JAXA-RR-09-004","subitem_description_type":"Other"}]},"item_3_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宇宙航空研究開発機構"}]},"item_3_publisher_9":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"Japan Aerospace Exploration Agency (JAXA)"}]},"item_3_source_id_21":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1349-1113","subitem_source_identifier_type":"ISSN"}]},"item_3_source_id_24":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA1192675X","subitem_source_identifier_type":"NCID"}]},"item_3_text_6":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"静岡大学"},{"subitem_text_value":"宇宙航空研究開発機構宇宙科学研究本部"},{"subitem_text_value":"宇宙航空研究開発機構宇宙科学研究本部"},{"subitem_text_value":"宇宙航空研究開発機構宇宙科学研究本部"}]},"item_3_text_7":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Shizuoka University"},{"subitem_text_language":"en","subitem_text_value":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS)(JAXA)"},{"subitem_text_language":"en","subitem_text_value":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS)(JAXA)"},{"subitem_text_language":"en","subitem_text_value":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS)(JAXA)"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"西村, 太一郎"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"小泉, 宏之"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"國中, 均"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"山極, 芳樹"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nishimura, Taichiro","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Koizumi, Hiroyuki","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kuninaka, Hitoshi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yamagiwa, Yoshiki","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-01-15"}],"displaytype":"detail","filename":"64642008.pdf","filesize":[{"value":"2.1 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"64642008.pdf","url":"https://jaxa.repo.nii.ac.jp/record/2089/files/64642008.pdf"},"version_id":"bd5dd974-e8de-4a75-a1fb-c0216bce544d"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Ion engine, Ion optics, Grid life time, Sputtering, QCM","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"technical report","resourceuri":"http://purl.org/coar/resource_type/c_18gh"}]},"item_title":"多チャンネルQCMを用いたディファレンシャル・スパッタリングの計測","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"多チャンネルQCMを用いたディファレンシャル・スパッタリングの計測"}]},"item_type_id":"3","owner":"1","path":["127","1893"],"pubdate":{"attribute_name":"公開日","attribute_value":"2015-03-26"},"publish_date":"2015-03-26","publish_status":"0","recid":"2089","relation_version_is_last":true,"title":["多チャンネルQCMを用いたディファレンシャル・スパッタリングの計測"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-06-21T09:28:49.257238+00:00"}