@article{oai:jaxa.repo.nii.ac.jp:00023085,
 author = {三田, 信 and 年吉, 洋 and Mita, Makoto and Toshiyoshi, Hiroshi},
 issue = {5},
 journal = {IEICE Electronics Express},
 month = {},
 note = {資料番号: PAIS08036000},
 pages = {256--263},
 title = {An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs},
 volume = {6},
 year = {2009}
}