@article{oai:jaxa.repo.nii.ac.jp:00023092,
 author = {中川, 聰子 and 田島, 道夫 and 廣瀬, 和之 and 大島, 武 and 伊藤, 久義 and Nakagawa-Toyota, Satoko and Tajima, Michio and Hirose, Kazuyuki and Ohshima, Takeshi and Itoh, Hisayoshi},
 journal = {Japanese Journal of Applied Physics},
 month = {},
 note = {資料番号: PAIS08043000},
 title = {Characterization of Light Element Impurities in Ultrathin Silicon-on-Insulator Layers by Luminescence Activation Using Electron Irradiation},
 volume = {48},
 year = {2009}
}