@article{oai:jaxa.repo.nii.ac.jp:00023500,
 author = {杉本, 広紀 and 田島, 道夫 and Sugimoto, Hiroki and Tajima, Michio},
 issue = {1},
 journal = {Journal of Materials Science: Materials in Electronics},
 month = {Feb},
 note = {Accepted: 2008-01-29, 資料番号: SA1000162000},
 pages = {127--131},
 title = {Ultra High-Speed Characterization of Multicrystalline Si Wafers by Photoluminescence Imaging with HF Immersion},
 volume = {19},
 year = {2008}
}