@article{oai:jaxa.repo.nii.ac.jp:00023503, author = {星乃, 紀博 and 田島, 道夫 and 林, 利彦 and 西口, 太郎 and 木下, 博之 and 塩見, 弘 and Hoshino, Norihiro and Tajima, Michio and Hayashi, Toshihiko and Nishiguchi, Taro and Kinoshita, Hiroyuki and Shiomi, Hiromu}, journal = {Materials Science Forum}, month = {}, note = {資料番号: SA1000166000}, pages = {275--278}, title = {Nondestructive Analysis of Stacking Faults in 4H-SiC Bulk Wafers by Room-Temperature Photoluminescence Mapping under Deep UV Excitation}, volume = {556-557}, year = {2007} }