@techreport{oai:jaxa.repo.nii.ac.jp:00002366, author = {足立, 聡 and 緒方, 康行 and 松本, 聡 and 越川, 尚清 and 高柳, 昌弘 and 依田, 真一 and 木下, 恭一 and Adachi, Satoshi and Ogata, Yasuyuki and Matsumoto, Satoshi and Koshikawa, Naokiyo and Takayanagi, Masahiro and Yoda, Shinichi and Kinoshita, Kyoichi}, month = {Mar}, note = {In order to estimate a diffusion coefficient, an InAs mole fraction profile, which is obtained by numerical simulation, is compared with a profile, which is experimentally obtained. The simulation result agrees well with the experimentally obtained profile. The diffusion coefficient is estimated to be about 1.1 x 10(exp -4) sq cm per sec by comparing the numerically obtained growth length with the experimentally obtained one., 資料番号: AA0048451004, レポート番号: JAXA-RR-04-022E}, title = {Estimation of diffusion coefficient by using numerical simulation of the Traveling Liquidus-Zone method}, year = {2005} }