@article{oai:jaxa.repo.nii.ac.jp:00023890,
 author = {中川, 聰子 and 曽根, 理嗣 and 田島, 道夫 and 大島, 武 and 伊藤, 久義 and Nakagawa, S. and Sone, Y. and Tajima, M. and Ohshima, T. and Itoh, H.},
 issue = {2-3},
 journal = {Materials Science and Engineering: B},
 month = {Oct},
 note = {Accepted: 2006-07-03, 資料番号: SA1000566000},
 pages = {172--175},
 title = {Photoluminescence evaluation of light element impurities in ultrathin SOI wafers by luminescence activation using electron irradiation},
 volume = {134},
 year = {2006}
}