{"created":"2023-06-20T14:36:06.828238+00:00","id":2413,"links":{},"metadata":{"_buckets":{"deposit":"c48019a7-a62a-446e-9b66-62f2907b6b50"},"_deposit":{"created_by":1,"id":"2413","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"2413"},"status":"published"},"_oai":{"id":"oai:jaxa.repo.nii.ac.jp:00002413","sets":["1887:1893","9:10:368:1974"]},"author_link":["6166","6161","6163","6168","6169","6159","6158","6162","6164","6167","6165","6160"],"item_3_alternative_title_2":{"attribute_name":"その他のタイトル（英）","attribute_value_mlt":[{"subitem_alternative_title":"Development of Mo/Si multi-layer grating for extreme ultra-violet spectrograph"}]},"item_3_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2004-03","bibliographicIssueDateType":"Issued"},"bibliographicVolumeNumber":"JAXA-RR-03-007","bibliographic_titles":[{"bibliographic_title":"宇宙航空研究開発機構研究開発報告"},{"bibliographic_title":"JAXA Research and Development Report","bibliographic_titleLang":"en"}]}]},"item_3_description_16":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"惑星大気圏から宇宙空間への原子の散逸量を測定する方法として、中性粒子・イオンの共鳴散乱光を観測して散逸量を求める方法がある。特に、H、He、Oなどの共鳴散乱光は極端紫外光領域にあり、極端紫外光を観測可能な光学系の開発が重要である。また、大気の空間分布やその時間変動を観測するためには撮像観測も必要である。この方法では従来、バンドパスフィルターと、その波長を強く反射するよう製作された多層膜反射鏡を組み合わせて、観測対象の散逸原子の共鳴散乱光のみを観測可能な光学系を作成し、衛星・ロケットに搭載して観測を行った。しかし、分光観測ではないので、1つの光学系で観測可能な共鳴散乱光は1波長に限られる。複数の原子の共鳴散乱光を同時に観測する場合は複数の光学系が必要となる。1つの光学系で複数の共鳴散乱光を観測するには、通常、光学系に分光器を組み込んで観測を行う。だが、反射鏡と分光器を用いた場合を比較すると、一般的に分光器は光量の損失が多い。今回はヘリウムイオンの共鳴散乱光(30.4nm)を強く反射するように、最上層にSi:5.0nm、その下にMo:4.4nmとSi:13.3nmのペア20層を回折格子に蒸着し、極端紫外光用のMo/Si多層膜回折格子を製作し、性能評価を行った。多層膜を蒸着しても回折格子の溝が埋まらないことを原子間力顕微鏡で確認した。また、多層膜回折格子の反射効率は、ブレーズ型が最大2.2％、ラミナー型が最大2.9％であった。多層膜技術を用いることで、単層膜で得られる反射効率の限界を超え、Pt単層膜の場合と比較して、Mo/Si多層膜では約5倍の反射効率を実現できた。","subitem_description_type":"Abstract"}]},"item_3_description_17":{"attribute_name":"抄録（英）","attribute_value_mlt":[{"subitem_description":"One of the methods to research the escaping atmosphere is to observe the resonance-scattered light from the escaping particles. Especially, the escaping H, He and O particles resonantly scatter extreme ultraviolet (EUV) lights (H I: 121.6 nm, He I: 58.4 nm, He II: 30.4 nm, O II: 83.4 nm). Therefore, it is important to develop the optics for EUV. In addition, imaging observation is necessary to observe the temporal variation of the escaping atmosphere. In this method, the optics consist of the bandpass filters and the multilayer-coated mirror for EUV. And the optics were loaded onto the satellites and rockets, and observed EUV. With these optics the demerit is non spectrum observation, in other words, single optics can detect single wavelength of EUV. Therefore plural optics using filters and mirror or the spectroscope are necessary to observe the plural particles simultaneously. But the demerit of spectroscope is much more loss of light than that with filters and mirror. This time the Mo/Si multilayer-coated gratings are produced for EUV light: 30.4nm, and their performance is evaluated. Evaporated are on the gratings with top layer of Si: 5.0 nm and 20 pairs of Mo: 4.4nm and Si: 13.3 nm. By Atomic Force Microscope, it is verified that the grooves of the multilayer gratings are not buried. In addition, maximum reflective efficiency of multilayer blazed grating is 2.2 percent, that of multilayer laminar grating is 2.9 percent. By multilayer technology, reflective efficiency of multilayer grating exceeded approximately 5 times higher than that of Pt monolayer grating.","subitem_description_type":"Other"}]},"item_3_description_32":{"attribute_name":"資料番号","attribute_value_mlt":[{"subitem_description":"資料番号: AA0046890000","subitem_description_type":"Other"}]},"item_3_description_33":{"attribute_name":"レポート番号","attribute_value_mlt":[{"subitem_description":"レポート番号: JAXA-RR-03-007","subitem_description_type":"Other"}]},"item_3_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宇宙航空研究開発機構"}]},"item_3_publisher_9":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"Japan Aerospace Exploration Agency (JAXA)"}]},"item_3_source_id_21":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1349-1113","subitem_source_identifier_type":"ISSN"}]},"item_3_source_id_24":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA1192675X","subitem_source_identifier_type":"NCID"}]},"item_3_text_6":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"宇宙航空研究開発機構 宇宙科学研究本部"},{"subitem_text_value":"宇宙航空研究開発機構 宇宙科学研究本部"},{"subitem_text_value":"宇宙航空研究開発機構 宇宙科学研究本部"},{"subitem_text_value":"電気通信大学 菅平宇宙電波観測所"},{"subitem_text_value":"宇宙航空研究開発機構 宇宙科学研究本部"},{"subitem_text_value":"宇宙航空研究開発機構 宇宙科学研究本部"}]},"item_3_text_7":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Japan Aerospace Exploration Agency Institute of Space and Astronautical Science"},{"subitem_text_language":"en","subitem_text_value":"Japan Aerospace Exploration Agency Institute of Space and Astronautical Science"},{"subitem_text_language":"en","subitem_text_value":"Japan Aerospace Exploration Agency Institute of Space and Astronautical Science"},{"subitem_text_language":"en","subitem_text_value":"University of Electro-Communications Sugadaira Space Radio Observatory"},{"subitem_text_language":"en","subitem_text_value":"Japan Aerospace Exploration Agency Institute of Space and Astronautical Science"},{"subitem_text_language":"en","subitem_text_value":"Japan Aerospace Exploration Agency Institute of Space and Astronautical Science"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"村地, 哲徳"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"金尾, 美穂"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"亀田, 真吾"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"山崎, 敦"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"吉川, 一朗"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"中村, 正人"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Murachi, Tetsunori","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kanao, Miho","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kameda, Shingo","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yamazaki, Atsushi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yoshikawa, Ichiro","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nakamura, Masato","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-01-15"}],"displaytype":"detail","filename":"46890000.pdf","filesize":[{"value":"2.4 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"46890000.pdf","url":"https://jaxa.repo.nii.ac.jp/record/2413/files/46890000.pdf"},"version_id":"e0943f0c-3181-4fdf-bc52-e07c9c4ea6ef"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"極端紫外光分光撮像","subitem_subject_scheme":"Other"},{"subitem_subject":"回折格子","subitem_subject_scheme":"Other"},{"subitem_subject":"光学測定","subitem_subject_scheme":"Other"},{"subitem_subject":"バンドパスフィルター","subitem_subject_scheme":"Other"},{"subitem_subject":"脱出粒子","subitem_subject_scheme":"Other"},{"subitem_subject":"H","subitem_subject_scheme":"Other"},{"subitem_subject":"He","subitem_subject_scheme":"Other"},{"subitem_subject":"O","subitem_subject_scheme":"Other"},{"subitem_subject":"extreme ultraviolet spectrograph","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"diffraction grating","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"optical measurement","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"bandpass filter","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"escaping particle","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"H","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"He","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"O","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"technical report","resourceuri":"http://purl.org/coar/resource_type/c_18gh"}]},"item_title":"極端紫外光分光撮像用のMo/Si多層膜回折格子の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"極端紫外光分光撮像用のMo/Si多層膜回折格子の開発"}]},"item_type_id":"3","owner":"1","path":["1893","1974"],"pubdate":{"attribute_name":"公開日","attribute_value":"2015-03-26"},"publish_date":"2015-03-26","publish_status":"0","recid":"2413","relation_version_is_last":true,"title":["極端紫外光分光撮像用のMo/Si多層膜回折格子の開発"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-06-21T09:23:01.343136+00:00"}