@article{oai:jaxa.repo.nii.ac.jp:00024143,
 author = {高橋, 一浩 and 三田, 信 and 藤田, 博之 and 年吉, 洋 and Takahashi, K. and Mita, M. and Fujita, H. and Toshiyoshi, H.},
 issue = {4},
 journal = {Journal of Microelectromechanical  Systems},
 month = {Aug},
 note = {資料番号: SA1000828000},
 pages = {818--827},
 title = {Switched-Layer Design for SOI Bulk Micromachined XYZ Stage Using Stiction Bar for Interlayer Electrical Connection},
 volume = {18},
 year = {2009}
}