@article{oai:jaxa.repo.nii.ac.jp:00024428,
 author = {小林, 大輔 and 三田, 吉郎 and 柴田, 直 and 藤田, 博之 and Kobayashi, Daisuke and Mita, Yoshio and Shibata, Tadashi and Bourouina, Tarik and Fujita, Hiroyuki},
 issue = {9},
 journal = {Journal of Micromechanics and Microengineering},
 month = {Sep},
 note = {資料番号: SA1001121000},
 pages = {S76--S81},
 title = {Batch bulk-micromachined high-precision metal-on-insulator microspires and their application to scanning tunneling microscopy},
 volume = {14},
 year = {2004}
}