@article{oai:jaxa.repo.nii.ac.jp:00025307,
 author = {廣瀬, 和之 and 北原, 宏良 and 服部, 健雄 and Hirose, Kazuyuki and Kitahara, H. and Hattori, T.},
 issue = {1-4},
 journal = {Applied Surface Science},
 month = {Jun},
 note = {資料番号: SA1002009000},
 pages = {351--355},
 title = {Characterization of dielectric properties of ultrathin SiO2 film formed on Si substrate},
 volume = {216},
 year = {2003}
}