@article{oai:jaxa.repo.nii.ac.jp:00025308, author = {廣瀬, 和之 and 川尻, 智司 and 服部, 健雄 and Hirose, Kazuyuki and Kawashiri, S. and Hattori, T.}, issue = {1-4}, journal = {Applied Surface Science}, month = {Jul}, note = {資料番号: SA1002010000}, pages = {202--206}, title = {XPS analysis of carrier trapping phenomena in ultrathin SiO2 film formed on Si substrate}, volume = {234}, year = {2004} }