@article{oai:jaxa.repo.nii.ac.jp:00025344, author = {伊藤, 勇希 and 秋本, 晃一 and 吉田, 広徳 and 榎本, 貴志 and 小林, 大輔 and 廣瀬, 和之 and Ito, Yuki and Akimoto, Koichi and Yoshida, Hironori and Emoto, Takashi and Kobayashi, Daisuke and Hirose, Kazuyuki}, journal = {Journal of Physics: Conference Series}, month = {}, note = {資料番号: SA1002046000}, title = {High-k Gate dielectric films studied by extremely asymmetric X-ray diffraction and X-ray photoelectron spectroscopy}, volume = {83}, year = {2007} }