@article{oai:jaxa.repo.nii.ac.jp:00025999, author = {三田, 信 and 丸山, 智史 and Yi, Yuheon and 高橋, 一浩 and 藤田, 博之 and 年吉, 洋 and Mita, Makoto and Maruyama, Satoshi and Yi, Yuheon and Takahashi, Kazuhiro and Fujita, Hiroyuki and Toshiyoshi, Hiroshi}, issue = {2}, journal = {IEEJ Transactions on Electrical and Electronic Engineering}, month = {Mar}, note = {資料番号: SA1002701000}, pages = {180--189}, title = {Multi-Physics Analysis for Micro Electromechanical Systems Based on Electrical Circuits Simulator}, volume = {6}, year = {2011} }