@article{oai:jaxa.repo.nii.ac.jp:00026034, author = {山下, 真司 and 三田, 信 and 藤田, 博之 and Hirade, Ryuichi and 山本, 毅 and 河合, 正昭 and 矢野, 光博 and Yamashita, Shinji and Mita, Makoto and Fujita, Hiroyuki and Hirade, Ryuichi and Yamamoto, Tsuyoshi and Kawai, Masaaki and Yano, Mitsuhiro}, issue = {1}, journal = {Journal of Microelectromechanical Systems}, month = {Feb}, note = {Accepted: 2010-10-19, 資料番号: SA1002736000}, pages = {270--278}, title = {Spatial Light Phase Modulator with Bidirectional Tilt-Piston Micromirror Array - Part I: Principle and Design}, volume = {20}, year = {2011} }