@article{oai:jaxa.repo.nii.ac.jp:00026036,
 author = {石田, 忠 and Nakajima, Y. and 角嶋, 邦之 and 三田, 信 and 年吉, 洋 and 藤田, 博之 and Ishida, T. and Nakajima, Y. and Kakushima, K. and Mita, Makoto and Toshiyoshi, H. and Fujita, H.},
 issue = {7},
 journal = {Journal of Micromechanics and Microengineering},
 month = {Jul},
 note = {資料番号: SA1002738000},
 title = {Design and fabrication of MEMS-controlled probes for studying the nano-interface under in situ TEM observation},
 volume = {20},
 year = {2010}
}