@article{oai:jaxa.repo.nii.ac.jp:00026409, author = {山根, 大輔 and Sun, Winston and 清田, 晴信 and 川崎, 繁男 and 藤田, 博之 and 年吉, 洋 and Yamane, Daisuke and Sun, Winston and Seita, Harunobu and Kawasaki, Shigeo and Fujita, Hiroyuki and Toshiyoshi, Hiroshi}, issue = {5}, journal = {Journal of Microelectromechanical Systems}, month = {Oct}, note = {Accepted: 2011-06-17, 資料番号: SA1003111000}, pages = {1211--1221}, title = {A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining}, volume = {20}, year = {2011} }