@article{oai:jaxa.repo.nii.ac.jp:00026530, author = {丸山, 智史 and 中田, 宗樹 and 三田, 信 and 高橋, 巧也 and 藤田, 博之 and 年吉, 洋 and Maruyama, Satoshi and Nakada, Muneki and Mita, Makoto and Takahashi, Takuya and Fujita, Hiroyuki and Toshiyoshi, Hiroshi}, issue = {1}, journal = {電気学会論文誌E (センサ・マイクロマシン部門誌), IEEJ Transactions on Sensors and Micromachines}, month = {}, note = {資料番号: SA1003232000}, pages = {1--9}, title = {An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation}, volume = {132}, year = {2012} }