@article{oai:jaxa.repo.nii.ac.jp:00026630, author = {田島, 道夫 and 東, 栄光 and 林, 利彦 and 木下, 博之 and 塩見, 弘 and Tajima, Michio and Higashi, Eiko and Hayashi, T. and Kinoshita, H. and Shiomi, H.}, issue = {6}, journal = {Applied Physics Letters}, month = {}, note = {Accepted: 2004-12-11, 資料番号: SA1003332000}, title = {Nondestructive characterization of dislocations and micropipes in high-resistivity 6H-SiC wafers by deep-level photoluminescence mapping}, volume = {86}, year = {2005} }