@article{oai:jaxa.repo.nii.ac.jp:00026942,
 author = {酒井, 和広 and 満田, 和久 and 山崎, 典子 and 竹井, 洋 and 山本, 亮 and 原, 徹 and 前畑, 京介 and 伊予本, 直子 and 田中, 啓一 and Sakai, Kazuhiro and Mitsuda, Kazuhisa and Yamasaki, Noriko Y. and Takei, Yoh and Yamamoto, Ryo and Hara, T. and Maehata, Keisuke and Iyomoto, Naoko and Tanaka, K.},
 issue = {5-6},
 journal = {Journal of Low Temperature Physics},
 month = {Jun},
 note = {Accepted: 2012-01-30, 資料番号: SA1003644000},
 pages = {759--764},
 title = {TEM-EDS with Breakthroughs in 3D Wiring and High-Speed Processing},
 volume = {167},
 year = {2012}
}