@article{oai:jaxa.repo.nii.ac.jp:00026965,
 author = {山根, 大輔 and Sun, Winston and 清田, 晴信 and 川崎, 繁男 and 藤田, 博之 and 年吉, 洋 and Yamane, Daisuke and Sun, Winston and Seita, Harinobu and Kawasaki, Shigeo and Fujita, Hiroyuki and Toshiyoshi, Hiroshi},
 issue = {2},
 journal = {IEICE Electronics Express},
 month = {},
 note = {資料番号: SA1003667000},
 pages = {80--85},
 title = {An SOI Bulk-micromachined Dual SPDT RF-MEMS Switch by Layer-wise Separation Design of Waveguide and Switching Mechanism},
 volume = {7},
 year = {2010}
}