@article{oai:jaxa.repo.nii.ac.jp:00026966, author = {山根, 大輔 and Sun, Winston and 川崎, 繁男 and 藤田, 博之 and 年吉, 洋 and Yamane, Daisuke and Sun, Winston and Kawasaki, Shigeo and Fujita, Hiroyuki and Toshiyoshi, Hiroshi}, issue = {24}, journal = {IEICE Electronics Express}, month = {}, note = {資料番号: SA1003668000}, pages = {1785--1789}, title = {A 12GHz Bulk-micromachined RF-MEMS Phase Shifter by SOI Layer-separation Design}, volume = {7}, year = {2010} }