@article{oai:jaxa.repo.nii.ac.jp:00026977, author = {丸山, 智史 and 三田, 信 and 諫本, 圭史 and 鄭, 昌鎬 and 藤田, 博之 and 年吉, 洋 and Maruyama, Satoshi and Mita, Makoto and Isamoto, Keiji and Chong, Changho and Fujita, Hiroyuki and Toshiyoshi, Hiroshi}, issue = {4}, journal = {電気学会論文誌E(センサ・マイクロマシン部門誌), IEEJ Transactions on Sensors and Micromachines}, month = {Apr}, note = {資料番号: SA1003679000}, pages = {77--85}, title = {準平行平板型静電トーションミラーの等価回路モデル}, volume = {132}, year = {2012} }